کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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1826640 | 1526472 | 2010 | 5 صفحه PDF | دانلود رایگان |
We present design and implementation details of the Diamond-NOM (nanometre optical metrology)—a non-contact profiler capable of measuring the surface topography of large (up to 1500 mm long) and heavy (up to 150 kg) optical assemblies with sub-nanometre resolution and repeatability. These levels of performance are essential to fabricate and optimize next generation optics. The capabilities of the Diamond-NOM have already enabled collaborations with optic manufacturers, including production of a preferentially deposited, large (1.2 m), synchrotron mirror with a slope error of ∼0.44 μrad rms and using bimorph technology to reduce figure error of a super-polished (elastic emission machining) optic to <1 nm peak to valley. We demonstrate that the BESSY-NOM scanning pentaprism and autocollimator concept is robust, easily transferable, and repeatable.
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 616, Issues 2–3, 1 May 2010, Pages 224–228