کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1826886 1027397 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Influence of carbon material and sputtering angle on stripper foil lifetime
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم ابزار دقیق
پیش نمایش صفحه اول مقاله
Influence of carbon material and sputtering angle on stripper foil lifetime
چکیده انگلیسی

Mixed noble gas (Kr+Ne) was used for ion beam sputtering (MIBS) with the aim to produce stripper foils with long lifetime.Further characteristics of the MIBS method were investigated. Angular thickness distributions were measured for the deposits of three crystalline structures of carbon sputter targets: synthetic diamond, glassy carbon and polycrystalline graphite. In this setup the vertical ion beam hits the horizontal surface of the respective carbon target. Differences are presented for three ion energies. In a second setup the angle of the sputter target relative to the vertical ion beam could be adjusted for preparing carbon deposits with lifetime dependences on the inclination angle α on a glassy carbon surface. Resulting stripper foils were tested for their lifetime depending on sputter material and sputtering angle θ in case of graphite. The lifetime measurements were performed with a 3.2 MeV Ne+ ion beam as usual.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 613, Issue 3, 11 February 2010, Pages 448–452
نویسندگان
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