Single-photon avalanche photodiodes with integrated quenching resistor

In this paper we present the results of the first electrical and optical characterization performed on STMicroelectronics new photosensor technology based on silicon single-photon avalanche photodiodes (SPAD). On the prospective of the design and the manufacturing of large-area silicon photomultipliers to be used as photodetectors for nuclear medicine imaging applications, we have modified our previous SPAD technology by means of the integration of a high-value quenching resistor to the photodiode. Moreover, an appropriate antireflective coating layer and the reduction of the quasi-neutral region thickness above the thin junction depletion layer have been introduced in the process flow of the device to enhance its spectral response in blue and near ultraviolet wavelength ranges. High gain, low leakage currents, low dark noise, very good quantum detection efficiency in blue–near UV ranges and a good linearity of the photodiode response to the incident luminous flux are the main characterization results.