Results from multipoint alignment monitoring using the new generation of amorphous silicon position detectors

We present the measured performance of a new generation of large sensitive area (28×28 mm2) semitransparent amorphous silicon position detector sensors. More than 100 units have been characterized. They show a very high performance. To illustrate a multipoint application, we present results from the monitoring of five sensors placed in a 5.5-m-long light path.