کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1831994 1027508 2007 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Analysis of artificial silicon microstructures by ultra-small-angle and spin-echo small-angle neutron scattering
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم ابزار دقیق
پیش نمایش صفحه اول مقاله
Analysis of artificial silicon microstructures by ultra-small-angle and spin-echo small-angle neutron scattering
چکیده انگلیسی

Ultra-Small-Angle Neutron Scattering (USANS) is currently becoming an effective technique for the analysis of structures in the micrometer range. The new Spin-Echo SANS (SESANS) method measures a signal in real space. In both cases microfabricated silicon gratings provide unique test procedures for the related devices and interpretations of the experimental data. A series of one-dimensional gratings was fabricated using a highly anisotropic ion etching technique (RIE) and measured at the USANS instrument S18 at ILL, Grenoble. Grating parameters derived from the experimental data are in agreement with the nominal values. Scattering length density correlation functions calculated from the USANS data are compared to SESANS correlation functions measured at the Delft University of Technology, demonstrating the reciprocity of the two scattering methods. Reconstruction techniques for one-dimensional scattering length density distributions are applied to the USANS data. The results are in good agreement with SEM micrographs of the samples.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 579, Issue 3, 11 September 2007, Pages 1081–1089
نویسندگان
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