Large-size high-performance transparent amorphous silicon sensors for laser beam position detection

We present the measured performance of a new generation of semitransparent amorphous silicon position detectors. They have a large sensitive area (30×30 mm2) and show good properties such as a high response (about 20 mA/W), an intrinsic position resolution better than 3 μm, a spatial-point reconstruction precision better than 10 μm, deflection angles smaller than 10 μrad and a transmission power in the visible and NIR higher than 70%.