Surface Functionalization of Micro Mechanical Cantilever Sensors by Organic Capped TiO2 and Fe2O3 Nanocrystals

A convenient and rapid procedure has been achieved to immobilize densely packed nanoporous 3D arrays of oleic acid (OLEA)-capped rod-shaped TiO2 nanocrystals (NCs) and nearly spherical Fe2O3 NCs on the surface of micro mechanical cantilever sensors on SU-8. The NCs have been immobilized at room temperature and in the dark on the micro cantilevers before their release. AFM, SEM and XPS investigations attest for an effective and attachment of the NCs on the SU-8 which occurs with not modifying the original morphology and chemical composition of the nano-objects allowing for an effective accomplishment of the cantilever fabrication.