A novel monolithic silicon sensor for measuring acceleration, pressure and temperature on a shock absorber

A fabricated micro-mechanical sensor to assess the condition of automotive shock absorbers is presented. The monolithic sensor, measures the oil temperature, acceleration and internal pressure of the shock absorber. A dual mass accelerometer with optimized beam geometry is used for acceleration readout. In addition, a 23.1 μm thickness square membrane and two buried resistors are used for pressure and temperature sensing respectively. The proposed miniaturized sensor can be effectively integrated with standard single- and dual-tube shock absorbers. The data acquired during normal vehicle operation can be continuously used to monitor the condition of the shock absorbers, allowing shock absorbers to be replaced before their degradation significantly reduce the comfort, performance and safety of the vehicle.