Experimental calibration and validation of a micromechanical accelerometer model suited for system-level design

In this work, we present a comprehensive calibration and validation procedure for extracting the parameters of a high-level model of a micromechanical accelerometer that can be applied in system-level design. In a first step, all relevant physical parameters inside the model have been extracted from FEM and mixed-level simulations. Subsequently, a dedicated measurement procedure has been carried out in order to validate the model, calibrate and adjust all relevant mechanical, electrical and fluidic damping parameters, and investigate the impact of “real-world” factors (e.g., manufacturing tolerances), which cannot be predicted by simulations alone.