Tester for space micro-accelerometer

Micro-accelerometer MAC04 has been developed in order to measure very low accelerations such as those caused to satellites by atmospheric drag and other non-gravitational forces. The instrument uses a cubic proof-mass inside a small cavity. In an open loop the change of capacitance between the cube and 12 electrodes on the inner cavity surface is a measure of the applied acceleration. It is very difficult to ground test and calibrate such a device due to gravity. The tester simulates the change of capacitances (base capacitance 13,5pF, changes in a range of ±1.5pF). Complete closed loop system is presented.