کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
239705 | 466199 | 2009 | 4 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Selective organic functionalization of polycrystalline silicon-germanium for bioMEMS applications Selective organic functionalization of polycrystalline silicon-germanium for bioMEMS applications](/preview/png/239705.png)
We selectively immobilized organofunctional silanes on top of polycrystalline silicon-germanium (poly-SiGe) layers, as a first step towards the fabrication of poly-SiGe-based bioMEMS (biomedical MicroElectroMechanicalSystems) by means of standard UV photolithography. 3-aminopropyl-dimethyl-ethoxysilane (APDMES) and 3-aminopropyl-triethoxysilane (APTES) molecules were immobilized onto resist-patterned poly-SiGe surfaces. The protocols for surface hydroxylation and silane immobilization were designed to be CMOS-compatible and to avoid damage to photoresist. Silanized surfaces were investigated both by means of fluorescence microscopy, and by FEG-SEM observation after labeling with 30 nm-diameter gold nanoparticles (NPs). We report the silanization protocols, together with the results indicating successful organic functionalization of the samples.
Journal: Procedia Chemistry - Volume 1, Issue 1, September 2009, Pages 252-255