Thermoelastic damping in microrings with circular cross-section

Predicting thermoelastic damping (TED) is crucial in the design of high Q micro-resonators. Microrings are often critical components in many micro-resonators. Some analytical models for TED in microrings have already been developed in the past. However, the previous works are limited to the microrings with rectangular cross-section. The temperature field in the rectangular cross-section is one-dimensional. This paper deals with TED in the microrings with circular cross-section. The temperature field in the circular cross-section is two-dimensional. This paper first presents a 2-D analytical model for TED in the microrings with circular cross-section. Only the two-dimensional heat conduction in the circular cross-section is considered. The heat conduction along the circumferential direction of the microring is neglected in the 2-D model. Then the 2-D model has been extended to cover the circumferential heat conduction, and a 3-D analytical model for TED has been developed. The analytical results from the present 2-D and 3-D models show good agreement with the numerical results of FEM model. The limitations of the present 2-D analytical model are assessed.