Analysis of thermoelastic dissipation in circular micro-plate resonators using the generalized thermoelasticity theory of dual-phase-lagging model

This study investigates the thermoelastic dissipation of micro-plate resonators by using the generalized thermoelasticity theory of dual-phase-lagging model. Explicit formulae of thermoelastic damping and frequency shift are derived. Influences of the plate thickness and vibration frequency on the thermoelastic damping are examined. Phenomena distinct from those of classical theory are observed in the numerical results of thermoelastic damping in micro-plate resonators. These results may bring new insights into the study of thermoelastic damping at submicrometer or nanometer scale.