PM based multi-component F/T sensors—State of the art and trends

Recent advancement in force/torque (F/T) sensor technologies have been powered by new measurement principles, novel structures of elastic elements (EEs), advanced manufacturing technologies, nonlinear signal processing and decoupling algorithms using artificial intelligence. The interlocked interaction of novel advances in these areas provide promising solutions improving the static and dynamic performances such as sensitivity, accuracy, compactness, economic efficiency, stiffness, and resonant frequency of F/T sensors.A detailed overview on the current selected solutions for significant developments of measurement principles, EE structures, manufacturing technologies, signal processing and decoupling methods characterizing recently F/T sensors. In addition, several predominantly development trends in the future are presented.