Optimal design of a 3-PUPU parallel robot with compliant hinges for micromanipulation in a cubic workspace

In recent years, nanotechnology has been developing rapidly due to its potential applications in various fields that new materials and products are produced. In this paper, a novel macro/micro 3-DOF parallel platform is proposed for micro positioning applications. The kinematics model of the dual parallel mechanism system is established by the stiffness model with individual wide-range flexure hinge and the vector-loop equation. The inverse solutions and parasitic rotations of the moving platform are obtained and analyzed, which are based on a parallel mechanism with real parameters. The reachable and usable workspace of the macro motion and micro motion of the mechanism are plotted and analyzed. Finally, based on the analysis of parasitic rotations and usable workspace of micro motion, an optimization for the parallel manipulator is presented. The investigations of this paper will provide suggestions to improve the structure and control algorithm optimization for the dual parallel mechanism in order to achieve the features of both larger workspace and higher motion precision.