Deposition of PMDA-TFDB type polyimide onto microscale trenches patterned on silicon wafer using supercritical carbon dioxide

Deposition of PMDA-TFDB type polyimide onto microscale trenches patterned on silicon wafer using supercritical carbon dioxide

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: The Journal of Supercritical Fluids - Volume 127, September 2017, Pages 200-207

Masashi Haruki, Atsuhiko Wasada, Yuki Hosokawa, Shin-ichi Kihara, Shigeki Takishima,