کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
4971608 1450524 2017 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Pattern image enhancement by automatic focus correction
ترجمه فارسی عنوان
تقویت الگوی تصویر با اصلاح تمرکز خودکار
کلمات کلیدی
تصحیح تمرکز، تجزیه و تحلیل شکست تبدیل گسسته گسسته، آستانه، تبدیل رادون، پردازش تصویر،
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
چکیده انگلیسی
Optical analysis techniques are key tools for the failure analysis and defect localization in integrated circuits. Using a confocal laser microscope, it is possible to extract different pieces of information such as spatial distribution of signals or voltage waveforms. Blur is getting a more and critical issue as technology pitch is getting smaller, very close to resolution limits. Find the correct focus, is a recurrent problem to solve in optical microscopy. The expert has to correct the blur disrupting the image, by manually searching the good focus. By consequences, this step may take a long time to identify regions of interest in the circuit. With this purpose in mind, the aim of this paper, is to propose an automatic process estimating the out-of-focus blur parameters characterized by specific attributes. Proposed technique takes advantage of extracted features in the Discrete Cosine Transform (DCT) of blurred images. The blur information is identified and allows to recover the blur's kernel. Finally, the accuracy and the robustness of the suggested process is demonstrated on real blurred images.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Reliability - Volumes 76–77, September 2017, Pages 249-254
نویسندگان
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