A hybrid prognostics approach for MEMS: From real measurements to remaining useful life estimation

This paper presents a hybrid prognostics approach for Micro Electro Mechanical Systems (MEMS). This approach relies on two phases: an offline phase for the MEMS and its degradation modeling, and an online phase where the obtained degradation model is used with the available data for prognostics. In the online phase, the particle filter algorithm is used to perform online parameters estimation of the degradation model and predict the Remaining Useful Life (RUL) of MEMS. The effectiveness of the proposed approach is validated on experimental data related to an electro-thermally actuated MEMS valve.