کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
4986775 | 1454955 | 2017 | 17 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Wear behavior of annealed atomic layer deposited alumina
ترجمه فارسی عنوان
رفتار لایه اتمی خاردار آلومینای پوشیده شده را پوشانده است
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی شیمی
شیمی کلوئیدی و سطحی
چکیده انگلیسی
Atomic layer deposited (ALD) alumina is a promising candidate for use as a wear-resistant and protective coating in MEMS and other applications. While the tribological properties of ALD alumina may be affected by numerous factors related to processing, environment, and operating conditions, its wear behavior is neither quantified nor well understood. In this study, ALD alumina is annealed at different temperatures, then subjected to sliding wear testing in a humid air environment. Tribological properties appear to be heavily influenced by annealing temperature. Surprisingly, the wear rate decreased by about two orders of magnitude after annealing at 1000 â°C for 1 hour. This improvement in wear resistance was shown to be influenced by the formation of crystalline phases as annealing temperature increased.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Wear - Volumes 372â373, 15 February 2017, Pages 139-144
Journal: Wear - Volumes 372â373, 15 February 2017, Pages 139-144
نویسندگان
Zakaria Hsain, Guosong Zeng, Nicholas C. Strandwitz, Brandon A. Krick,