کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5006577 | 1461487 | 2017 | 35 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Direct transduction method for measuring the ultrasonic attenuation in Si(111) in the frequency range 100Â MHz-1Â GHz
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
کنترل و سیستم های مهندسی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Direct transduction method for measuring the ultrasonic attenuation in Si(111) in the frequency range 100Â MHz-1Â GHz Direct transduction method for measuring the ultrasonic attenuation in Si(111) in the frequency range 100Â MHz-1Â GHz](/preview/png/5006577.png)
چکیده انگلیسی
A direct ultrasonic transduction method was investigated as a function of frequency in order to evaluate the ultrasonic attenuation in doped n-type Si(111) by using a setup where an incorporated small spring acts as an adjustable coil. Measurements were performed in the frequency range from 100Â MHz to 1Â GHz using an AlN transducer produced directly on the Si sample. A vector network analyzer (VNA) was used to record the acoustic reflections. Dependence of the generated wave central frequency on transducer thickness, active area and circuit impedance was examined. One-dimensional (1D) simulations using an equivalent electrical circuit were carried out to validate the VNA measurements. An overall agreement was observed. The wave attenuation in the highly doped n-type Si(111) was found to have a quadratic dependance on the frequency.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Measurement - Volume 100, March 2017, Pages 279-287
Journal: Measurement - Volume 100, March 2017, Pages 279-287
نویسندگان
Safia Lemlikchi, Mohammed Asmani, Hakim Djelouah, Peter Schaaf,