Vibration-insensitive low coherence interferometer (LCI) for the measurement of technical surfaces

In this paper, we introduce a robot guided low coherence interferometer (LCI) system, that can compensate inevitable drifts and vibrations using high-speed data acquisition and a phase correction method, which can analyze and correct distorted inferoferograms using Hilbert-Transform in the frequency domain. Utilizing these methods the measurement performance of this system can be improved in comparison with the conventional LCI, to reduce non-measured areas and to reach a low measurement deviation of less than 0.1 μm. The detailed capability of the proposed methods for the identification and the compensation of environmental vibration is shown based on experimental data.