Carrier-separating demodulation of phase shifting self-mixing interferometry

A carrier separating method associated with noise-elimination had been introduced into a sinusoidal phase-shifting self-mixing interferometer. The conventional sinusoidal phase shifting self-mixing interferometry was developed into a more competitive instrument with high computing efficiency and nanometer accuracy of λ/100 in dynamical vibration measurement. The high slew rate electro-optic modulator induced a sinusoidal phase carrier with ultralow insertion loss in this paper. In order to extract phase-shift quickly and precisely, this paper employed the carrier-separating to directly generate quadrature signals without complicated frequency domain transforms. Moreover, most noises were evaluated and suppressed by a noise-elimination technology synthesizing empirical mode decomposition with wavelet transform. The overall laser system was described and inherent advantages such as high computational efficiency and decreased nonlinear errors of the established system were demonstrated. The experiment implemented on a high precision PZT (positioning accuracy was better than 1 nm) and compared with laser Doppler velocity meter. The good agreement of two instruments shown that the short-term resolution had improved from 10 nm to 1.5 nm in dynamic vibration measurement with reduced time expense. This was useful in precision measurement to improve the SMI with same sampling rate. The proposed signal processing was performed in pure time-domain requiring no preprocessing electronic circuits.