کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5007784 1461700 2017 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Review of surface profile measurement techniques based on optical interferometry
ترجمه فارسی عنوان
بررسی تکنیک های اندازه گیری پروفیل سطح براساس تداخل سنجی نوری
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
چکیده انگلیسی


- Optical interferometric profilometry have been used widely for good properties.
- A review on profile interferometric measurement techniques is introduced with a classification.
- Typical designs are selected to be examples with figures.

With the fast development of modern science and technology, two or three-dimensional surface profile measurement techniques with high resolution and large dynamic range are urgently required. Among them, the techniques based on optical interferometry have been widely used for their good properties of non-contact, high resolution, large dynamic measurement range and well-defined traceability route to the definition of meter. A review focused on surface profile measurement techniques of optical interferometry is introduced in this paper with a detailed classification sorted by operating principles. Examples in each category are discussed and analyzed for better understanding.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics and Lasers in Engineering - Volume 93, June 2017, Pages 164-170
نویسندگان
, , , ,