کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5008167 1461834 2017 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Comparison between Ir, Ir0.85Rh0.15 and Ir0.7Rh0.3 thin films as electrodes for surface acoustic waves applications above 800 °C in air atmosphere
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Comparison between Ir, Ir0.85Rh0.15 and Ir0.7Rh0.3 thin films as electrodes for surface acoustic waves applications above 800 °C in air atmosphere
چکیده انگلیسی
In this paper, we investigate the suitability of Ir, Ir0.85Rh0.15 and Ir0.7Rh0.3 thin films as electrodes for surface acoustic waves (SAW devices) applications taking place above 800 °C in air atmosphere. As expected, all films oxidize from 800 °C in IrO2 or IrxRh1-xO2 phase. The electrical properties of the latter remain compatible with the design of SAW devices, with a specific electrical resistance of 151 and 100 μΩ·cm for x = 0.7 and x = 0.85 respectively. Moreover, we observe that the IrxRh1-xO2 phase is much more stable regarding sublimation effect than the IrO2 phase, highlighting the interest of alloying Ir with Rh for high-temperature applications. SAW devices based on langasite substrate and Ir0.85Rh0.15 electrodes show a very good stability for at least several days at 800 °C in air. In the case of Ir0.7Rh0.3 electrodes, this stability is extended to temperatures up to 900 °C.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 266, 15 October 2017, Pages 211-218
نویسندگان
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