کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5008167 | 1461834 | 2017 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Comparison between Ir, Ir0.85Rh0.15 and Ir0.7Rh0.3 thin films as electrodes for surface acoustic waves applications above 800 °C in air atmosphere
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
In this paper, we investigate the suitability of Ir, Ir0.85Rh0.15 and Ir0.7Rh0.3 thin films as electrodes for surface acoustic waves (SAW devices) applications taking place above 800 °C in air atmosphere. As expected, all films oxidize from 800 °C in IrO2 or IrxRh1-xO2 phase. The electrical properties of the latter remain compatible with the design of SAW devices, with a specific electrical resistance of 151 and 100 μΩ·cm for x = 0.7 and x = 0.85 respectively. Moreover, we observe that the IrxRh1-xO2 phase is much more stable regarding sublimation effect than the IrO2 phase, highlighting the interest of alloying Ir with Rh for high-temperature applications. SAW devices based on langasite substrate and Ir0.85Rh0.15 electrodes show a very good stability for at least several days at 800 °C in air. In the case of Ir0.7Rh0.3 electrodes, this stability is extended to temperatures up to 900 °C.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 266, 15 October 2017, Pages 211-218
Journal: Sensors and Actuators A: Physical - Volume 266, 15 October 2017, Pages 211-218
نویسندگان
Amine Taguett, Thierry Aubert, Omar Elmazria, Florian Bartoli, Marc Lomello, Michel Hehn, Jaafar Ghanbaja, Pascal Boulet, Stéphane Mangin, Yong Xu,