All-solid-state microscale lithium-ion battery fabricated by a simple process with graphene as anode

Few works directly utilize monolayer or few-layer Graphene in energy storage because of the limited active materials. But it can be exploited in micro-power sources with low-rise power requirement, especially the microscale thin film lithium-ion batteries (MBs). Here a simple micro-fabrication process including one-step magnetron sputtering, is developed for fabricating the MBs with the ultrathin Graphene as anode. The footprint area of a single battery is ∼1 mm2 and the total thickness is ∼600 nm. In the MBs, lithium cobalt oxide (LiCoO2) and lithium phosphorous oxynitride (LiPON) films are used as the cathode and electrolyte, respectively. This work provides guidance to manufacture high performance micro-power devices using advanced materials by a simple process.