کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5009741 | 1462049 | 2017 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Pressure free nanoimprinting lithography using ladder-type HSQ material for LSPR biosensor chip
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We present an ingenious pressure free NIL (Nanoimprint lithography) method by simply employing a very thin PDMS mold along with a Spin-on-Glass HSQ material. Fabricating nano-patterns (i.e. nano-gratings and 2 D nano-arrays) via NIL is advantageous for LSPR based biosensors for producing large working area with high-throughput. Unlike conventional NIL and other fabrication methods, no complicated equipment is required in this work; only a simple heating plate (at 100 °C) was utilized for curing time reduction. Nano-pillar structure with definition down to 50-100 nm has been successfully fabricated using this method. After Au-deposition, mushroom like Au-capped nano-pillar chip has been successfully validated as a LSPR bio-sensor chip for IgA detection. In addition, this method provides promising features for higher dimensional structures fabrication which is considered as a beneficial tool for LSPR based biosensor sensitivity enhancement.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 242, April 2017, Pages 47-55
Journal: Sensors and Actuators B: Chemical - Volume 242, April 2017, Pages 47-55
نویسندگان
Shu Jiang, Masato Saito, Mizuho Murahashi, Eiichi Tamiya,