کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5025964 | 1470596 | 2017 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Automatic alignment of angularly multiplexed beams in excimer laser MOPA system
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Automatic alignment of angularly multiplexed beams in excimer laser MOPA system Automatic alignment of angularly multiplexed beams in excimer laser MOPA system](/preview/png/5025964.png)
چکیده انگلیسی
We present the study on multiplexed beams automatic alignment of high efficiency excimer laser. He-Cd laser with the wavelength of 325Â nm is selected as the automatic alignment laser at first. And then, the crosshair arrays close to lens array are proposed and designed as the references of near-field and far-field, whereafter array beams are imaged and processed by specific fluorescence imaging system and region segmentation separately. Experiments are carried out in pre-amplifier II with three beams and double passes in excimer laser MOPA system. Results indicate that accuracy of the automatic alignment beam is 0.54% of the diameter of the windows. Meanwhile, the whole process of automatic alignment just takes 40Â s, which ensures intelligent and high effective integration of automatic alignment system.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - International Journal for Light and Electron Optics - Volume 131, February 2017, Pages 556-561
Journal: Optik - International Journal for Light and Electron Optics - Volume 131, February 2017, Pages 556-561
نویسندگان
Dahui Wang, Hang Qian, Xueqing Zhao, Yongsheng Zhang, Yang Zhu, Jun Zhao,