Mathematical modeling of signal transfer process into optical system of a linear displacement encoder

Linear displacement encoders are necessary in field of machine tools, metrology and electronic industry. Those devices provide nanometric resolution when constructed according to the interferometric scheme. Mathematical modeling of signal transfer process into its optical system to analyze an interference field is described. Signal intensity depending on a small displacement of moving grating phase shift correlations is considered. A sample model of the linear optical encoder is developed based on the optical scheme under research.