SiC MOSFET Soot Sensor in a Co-fired LTCC Package

A novel method for soot detection based on SiC MOSFET devices with a dual suspended/ floating gate configuration in a co-fired LTCC package has been investigated. Response to different concentrations of soot was measured through the application of an electric field between the two gate electrodes to attract charged soot onto the sensor surface. Results are promising with application areas from automotive and transportation to air pollution control.