کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5029346 1470658 2016 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
P-type BSI Image Sensor with Active Deep Trench Interface Passivation for Radiation-hardened Imaging Systems
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
P-type BSI Image Sensor with Active Deep Trench Interface Passivation for Radiation-hardened Imaging Systems
چکیده انگلیسی
We propose a P-type back-side-illuminated (BSI) image sensor for applications involving harsh ionizing environment. Its pixel structure implements a hole-collection vertical photodiode and 2T PMOS shared-readout circuitry. It also integrates capacitive deep trench isolation (CDTI) which allows active surface passivation. The proposed pixel structure exhibits intrinsically lower level of dark current than its N-type counterpart and improved radiation hardness. After receiving a total ionizing dose up to 1 kGy from 6 MeV gamma radiation, the average dark current of the P-type CDTI sensor increases only by a factor 3.6 compared with a 30-fold increase for the N-type counterpart. The proposed P-type exhibits much more effective surface passivation, which prevents dark current degradation due to surface thermal generation mechanism.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Procedia Engineering - Volume 168, 2016, Pages 176-180
نویسندگان
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