LTCC Microfluidic Systems for Biochemical Diagnosis

This paper presents design, fabrication and testing of three LTCC (Low Temperature Co-fired Ceramics) based microfluidic systems. These microdevices are: enzymatic microreactor for urea determination, potentiometric sensor with ion selective electrodes (ISE) based array sensitive to potassium ions and amperometric glucose sensor. Performance of the presented LTCC-based microfluidic systems has been tested. All ceramic microdevices have revealed high output signal and large detection range. The properties of the presented LTCC-based microfluidic systems are comparable with similar ones made of silicon. Obtained results has shown that presented ceramic microsystems can work as a stand-alone device or can be integrated into a more sophisticated micro analysis system for in vivo or in vitro monitoring of various (bio)chemical compounds.