Picosecond laser micromachining prior to FIB milling for electronic microscopy sample preparation

Picosecond laser micromachining prior to FIB milling for electronic microscopy sample preparation

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 418, Part B, 1 October 2017, Pages 607-615

Aurélien Sikora, Lahouari Fares, Jérôme Adrian, Vincent Goubier, Anne Delobbe, Antoine Corbin, Marc Sentis, Thierry Sarnet,