کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5347156 | 1503545 | 2018 | 28 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Enhanced electrical properties of ZnO transparent conducting films prepared by electron beam annealing
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Pure ZnO precursor films were prepared by a sol-gel spin coating method. The films were directly annealed by the electron beam (EB) for 5 min. The structural, optical and electrical properties were investigated by means of SEM, AFM, XRD, UV-vis spectrophotometer and Hall-effect measurement. SEM and AFM studies revealed smooth, dense film microstructure with some holes. The average grain size ranged from 10 nm to 60 nm and the surface RMS roughness of the films is less than 3 nm. X-rays diffraction patterns showed (002) preferential growth in all annealed films. From optical transmittance spectra, the absorption edge of the films was determined to be at â¼380 nm with > 85% transmittance in visible region. ZnO film annealed with beam current 0.7 mA was found to exhibit minimum resistivity value of 1.57 Ã 10â2 Ωcm and carrier concentration as high as 6.37 Ã 1019 cmâ3, which is 2 â¼Â 3 orders better than that of the typical pure ZnO thin films using sol-gel method.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 428, 15 January 2018, Pages 191-198
Journal: Applied Surface Science - Volume 428, 15 January 2018, Pages 191-198
نویسندگان
Yanli Li, Yong Men, Xiangdong Kong, Zhaoshun Gao, Li Han, Xiaona Li,