کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5347293 | 1503581 | 2016 | 24 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication and surface characterization of photopatterned encapsulated micromagnets for microrobotics and microfluidics applications
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
In this paper, encapsulated micromagnets with magnetic core surrounded by pure SU-8 were fabricated utilizing multilayer photolithography with a middle NdFeB magnetic composite layer. Various geometries of micromagnets were fabricated with high density magnetic core and high resolution features, showing magnetically response while still being biocompatible and chemically resistant and making them suitable for a wide range of microrobotics and microfluidics applications. Especially, crescent and C-channel micromagnets showed potential of microtransportation devices because of their interior reservoirs. Surface characterization of the micromagnets was conducted using closed-form solutions derived from the general biplanar surface characterization method. The fabrication method was evaluated and the process errors were found less than 1%.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 386, 15 November 2016, Pages 364-370
Journal: Applied Surface Science - Volume 386, 15 November 2016, Pages 364-370
نویسندگان
Hui Li, William Leachman, Joe Kershaw,