Nonhomogeneous surface properties of parylene-C film etched by an atmospheric pressure He/O2 micro-plasma jet in ambient air

Nonhomogeneous surface properties of parylene-C film etched by an atmospheric pressure He/O2 micro-plasma jet in ambient air

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 383, 15 October 2016, Pages 261-267

Tao Wang, Bin Yang, Xiang Chen, Xiaolin Wang, Chunsheng Yang, Jingquan Liu,