کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5347693 | 1388052 | 2017 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Ellipsometry of single-layer antireflection coatings on transparent substrates
ترجمه فارسی عنوان
الیسپومتری پوشش های تک لایه ضد انفجار بر روی بستر های شفاف
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
چکیده انگلیسی
The complex reflection coefficients of p- and s-polarized light and ellipsometric parameters of a transparent substrate of refractive index n2, which is coated by a transparent thin film whose refractive index n1=n2 satisfies the anti-reflection condition at normal incidence, are considered as functions of film thickness d and angle of incidence Ï. A unique coated surface, with n1=n2 and film thickness d equal to half of the film-thickness period DÏ at angle Ï and wavelength λ, reflects light of the same wavelength without change of polarization for all incident polarization states. (The reflection Jones matrix of such coated surface is the 2 Ã 2 identity matrix pre-multiplied by a scalar, hence tanΨ = 1,Π= 0.) To monitor the deposition of an antireflection coating, the normalized Stokes parameters of obliquely reflected light (e.g. atÏ=70â) are measured until predetermined target values of those parameters are detected. This provides a more accurate means of film thickness control than is possible using a micro-balance technique or an intensity reflectance method.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 421, Part B, 1 November 2017, Pages 271-275
Journal: Applied Surface Science - Volume 421, Part B, 1 November 2017, Pages 271-275
نویسندگان
R.M.A. Azzam,