کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5347787 | 1388052 | 2017 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Convergence and precision characteristics of finite difference time domain method for the analysis of spectroscopic ellipsometry data at oblique incidence
ترجمه فارسی عنوان
ویژگی های همگرایی و دقت روش دامنه اختلاف زمانی محدود برای تجزیه و تحلیل داده های طیف سنجی ایلپسومتری در بروز مضر
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
چکیده انگلیسی
The finite difference time domain (FDTD) method presents attractive advantages for analysis of the spectroscopic ellipsometry (SE) response of complex, non-planar samples including generality and suitability to address complex structures as well as non-linear effects and/or non-periodic morphologies. However, it is imperative to advance our understanding, and more importantly, to design strategies to improve the computational time of FDTD method calculations. In a previous report we show the ability to simulate the SE response of prototypical samples based on far-field projections of near-field simulation based on the FDTD method with accuracy equivalent to â¼0.5 monolayer precision in film thickness up to 70° angle of incidence (AoI). In this contribution, we provide a refined strategy that results in â¼3 orders of magnitude improvement in the determination of the SE data as estimated by the Ï2 figure of merit for modeling of SE data at angles as large as 80° AoI with respect to the standard solution. Significantly the proposed strategy also provides improvement in the computation time that speeds up by a factor â¼4à at 70° AoI but that can be as large as â¼20à for 40° AoI.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 421, Part B, 1 November 2017, Pages 878-883
Journal: Applied Surface Science - Volume 421, Part B, 1 November 2017, Pages 878-883
نویسندگان
Yishu Foo, Juan Antonio Zapien,