Investigation of interdiffusion and depth resolution in Cu/Ni multilayers by means of AES depth profiling

- The interdiffusion coefficient of Cu/Ni multilayer was extracted using the Mixing-Roughness-Information (MRI) model.
- The depth-dependent interdiffusion coefficients were quantitatively evaluated.
- Diffusion length as small as a nanometer scale could be measured using MRI model.
- The depth-dependent depth resolutions were quantitatively evaluated.