کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5348286 1503576 2017 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube
ترجمه فارسی عنوان
اثر تخلیه پلاسما خود بهبود یافته در رسوب کربن الماس مانند بر روی سطح داخلی لوله باریک
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
چکیده انگلیسی
Enhanced glow discharge plasma immersion ion implantation and deposition (EGD-PIII&D) have been proved to be highly effective for depositing diamond-like carbon (DLC) films on the inner surface of the slender quartz tube with a deposition rate of 1.3 μm/min. Such a high-efficiency DLC films deposition was explained previously as the short electrons mean free path to cause large collision frequency between electrons and neutral particles. However, in this paper, we found that the inner surface material of the tube itself play a vital role on the films deposition. To disclose the mechanism of this phenomenon, the effect of different inner surface materials on plasma discharge was experimentally and theoretically investigated. Then a self-enhancing plasma discharge is discovered. It is found that secondary electrons emitted from the inner surface material, whatever it is the tube inner surface or deposited DLC films, can dramatically enhance the plasma discharge to improve the DLC films deposition rate.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 393, 30 January 2017, Pages 467-473
نویسندگان
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