کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5348537 | 1388083 | 2016 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Experimental investigation on photoelectric properties of ZAO thin film deposited on flexible substrate by magnetron sputtering
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Experimental investigation on photoelectric properties of ZAO thin film deposited on flexible substrate by magnetron sputtering Experimental investigation on photoelectric properties of ZAO thin film deposited on flexible substrate by magnetron sputtering](/preview/png/5348537.png)
چکیده انگلیسی
Transparent conductive ZAO (Zinc Aluminum Oxide) films on flexible substrates have a great potential for low-cost mass-production solar cells. ZAO thin films were achieved on flexible PET (polyethylene terephthalate) substrates by RF magnetron sputtering technology. The surface morphology and element content, the transmittance and the sheet resistance of the films were measured to determine the optical process parameters. The results show that the ZAO thin film shows the best parameters in terms of photoelectric performance including sputtering power, working pressure, sputtering time, substrate temperature (100 W, 1.5 Pa, 60 min, 125 °C). The sheet resistance of 510 Ω and transmittance in visible region of 92% were obtained after characterization. Surface morphology was uniform and compact with a good crystal grain.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 388, Part A, 1 December 2016, Pages 259-267
Journal: Applied Surface Science - Volume 388, Part A, 1 December 2016, Pages 259-267
نویسندگان
Ming Hao, Kun Liu, Xinghua Liu, Dongyang Wang, Dechun Ba, Yuanhua Xie, Guangyu Du, Yaoshuai Ba,