کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5349465 1503620 2015 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Laser-induced damage of Ta2O5 films obtained from TaCl5 precursor and annealed at different temperatures
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Laser-induced damage of Ta2O5 films obtained from TaCl5 precursor and annealed at different temperatures
چکیده انگلیسی
In this study, Ta2O5 sol was synthesized from TaCl5 precursor, and its time dependence of the viscosity, particle size distribution and photoluminescence spectra were studied. Then, Ta2O5 films were prepared using this sol and were succeeding annealed at different temperatures without carbonization and cracks. It was found that the films had good properties such as high transparency, small absorption and high laser-induced damage threshold (LIDT). The LIDT decreased with the increase of the annealing temperature probably due to the acetylacetone in the films. The laser-induced damage morphologies of the films after annealing were different. With the annealing temperature increase, the dominant factor of the laser-induced damage transformed gradually from the stress to the thermal. According to the LIDT and damage morphologies, a structure evolution model of the films annealed at different temperatures was proposed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 344, 30 July 2015, Pages 137-145
نویسندگان
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