کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5349465 | 1503620 | 2015 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Laser-induced damage of Ta2O5 films obtained from TaCl5 precursor and annealed at different temperatures
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
In this study, Ta2O5 sol was synthesized from TaCl5 precursor, and its time dependence of the viscosity, particle size distribution and photoluminescence spectra were studied. Then, Ta2O5 films were prepared using this sol and were succeeding annealed at different temperatures without carbonization and cracks. It was found that the films had good properties such as high transparency, small absorption and high laser-induced damage threshold (LIDT). The LIDT decreased with the increase of the annealing temperature probably due to the acetylacetone in the films. The laser-induced damage morphologies of the films after annealing were different. With the annealing temperature increase, the dominant factor of the laser-induced damage transformed gradually from the stress to the thermal. According to the LIDT and damage morphologies, a structure evolution model of the films annealed at different temperatures was proposed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 344, 30 July 2015, Pages 137-145
Journal: Applied Surface Science - Volume 344, 30 July 2015, Pages 137-145
نویسندگان
Cheng Xu, Dawei Li, Heliang Fan, Jianwei Qi, Jianxin Deng, Shuai Yang, Peng Yi, Yinghuai Qiang,