Analysis of bistable inductive micro-switch based on surface micro size effect

The inductive micro-switch can not only induce an external acceleration, but also be controlled by the external acceleration to realize a trigger action. It is an integrative device of a sensor and an actuator. However, little work has been done to develop a comprehensive model to accurately analyze the micro size effect during micro-switch contact process. So its malfunctions related to “fail-to-closure” and “transient-closure” result in low reliability and weak anti-jamming capability. A bistable inductive micro-switch is presented based on nano electro-mechanical system (NEMS) technology and micro size effect. And the sine-model is used to describe the rough contact surface of the micro-switch. Micro size forces such as the Casimir force and van der Waals (vdW) force are analyzed in detail using the principles of vacuum energy and the Wigner-Seitz micro-continuum media. The vdW force includes the repulsive force. The simulation results of the Casimir force varied with the gap are obtained, which is compared with the relative experimental result. The dynamic equation of the bistable inductive micro-switch is established. Dynamic simulation results are shown to be in agreement with experimental results. The threshold acceleration is 6.8 g, and the response time is 17.5 μs.