Electrical and structural properties of surfaces and interfaces in Ti/Al/Ni Ohmic contacts to p-type implanted 4H-SiC

Electrical and structural properties of surfaces and interfaces in Ti/Al/Ni Ohmic contacts to p-type implanted 4H-SiC

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 420, 31 October 2017, Pages 331-335

M. Vivona, G. Greco, C. Bongiorno, R. Lo Nigro, S. Scalese, F. Roccaforte,