Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study

Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 406, 1 June 2017, Pages 178-185

Yu Sun, Yilun Liu, Xuefeng Chen, Zhi Zhai, Fei Xu, Yijun Liu,