Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask

Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 385, 1 November 2016, Pages 145-152

D. Virganavičius, V.J. Cadarso, R. Kirchner, L. Stankevičius, T. Tamulevičius, S. Tamulevičius, H. Schift,