Identification and roles of nonstoichiometric oxygen in amorphous Ta2O5 thin films deposited by electron beam and sputtering processes

Identification and roles of nonstoichiometric oxygen in amorphous Ta2O5 thin films deposited by electron beam and sputtering processes

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 385, 1 November 2016, Pages 426-435

Cedric Mannequin, Tohru Tsuruoka, Tsuyoshi Hasegawa, Masakazu Aono,