The role of Ar plasma treatment in generating oxygen vacancies in indium tin oxide thin films prepared by the sol-gel process

The role of Ar plasma treatment in generating oxygen vacancies in indium tin oxide thin films prepared by the sol-gel process

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 405, 31 May 2017, Pages 344-349

Deuk-Kyu Hwang, Mirnmoy Misra, Ye-Eun Lee, Sung-Doo Baek, Jae-Min Myoung, Tae Il Lee,