Quality-enhanced AlN epitaxial films grown on c-sapphire using ZnO buffer layer for SAW applications

Quality-enhanced AlN epitaxial films grown on c-sapphire using ZnO buffer layer for SAW applications

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 402, 30 April 2017, Pages 392-399

Sulei Fu, Qi Li, Shuang Gao, Guangyue Wang, Fei Zeng, Feng Pan,