Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness

► The essence of medium energy ion scattering (MEIS) for nanolayer analysis is given. ► MEIS is applied to characterise high-k nanolayers and (DRAM) multilayer structures. ► MEIS is shown to give quantitative composition depth profiles and layer thicknesses. ► MEIS is shown to identify the nature & extent of layer intermixing and segregation.