Morphological and structural characterization of SiC based composite nanostructures

The influence of deposition parameters on the structure, surface morphology and composition of different SiC based structures was studied by atomic force microscopy, scanning electron microscopy, secondary ion mass spectrometry, transmission electron microscopy and selected area electron diffraction. Fibers, tubes, nanoparticles and rolled sheets structures were obtained by varying laser fluence, substrate temperature, gas pressure and radio-frequency power.